1. Technical Challenges & Void Formation Mechanisms
In HDI PCB and IC substrate manufacturing, void-free plating of micro-vias (e.g., 50μm diameter, 10:1 aspect ratio) faces critical challenges:
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Mass transfer limitation: Poor electrolyte flow in deep vias;
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Non-uniform current distribution: "Dog-bone" effect at via openings;
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Additive degradation: Imbalance in accelerator/inhibitor concentrations.
2. Additive System Mechanisms & Synergy
Three additive classes enable "bottom-up" filling:
2.1 Accelerators
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Function: Adsorb at via bottoms to enhance Cu²⁺ reduction;
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Example: SPS (bis-3-sulfopropyl disulfide), 1–5 ppm;
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Mechanism:

2.2 Suppressors
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Function: Form polymeric films at via openings to suppress over-plating;
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Example: PEG (MW 6000–8000) + Cl⁻, 50–200 ppm;
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Mechanism:

2.3 Levelers
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Function: Selective adsorption on protrusions to planarize deposits;
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Example: Janus Green B, 0.5–2 ppm;
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Mechanism:

3. Additive Ratio Optimization Strategies
3.1 DOE Methodology
Box-Behnken design with three factors (accelerator A, suppressor B, leveler C):
| Factor | Low | Mid | High |
|---|---|---|---|
| A (ppm) | 1 | 3 | 5 |
| B (ppm) | 50 | 125 | 200 |
| C (ppm) | 0.5 | 1.25 | 2 |
Responses:
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Filling Ratio (FR) = (Cu volume / Via volume) ×100%;
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Surface roughness (Ra≤0.2μm);
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Deposition rate (15–25 μm/min).
3.2 Optimization Results
Regression model (R²>0.95):

Optimal ratio: A=3.8 ppm, B=90 ppm, C=1.5 ppm, predicted FR=98.5%.
3.3 Dynamic Control
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In-line monitoring: HPLC + CVS for real-time additive tracking;
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Auto-dosing: PID-controlled pumps maintain ±5% concentration stability.
4. Process Parameter Synergy
| Parameter | Range | Impact |
|---|---|---|
| Current density | 1.5–2.5 ASD | Low density → Bottom-up fill |
| Temperature | 22–25°C | High temp → Accelerator decay |
| Agitation | 200–400 rpm | Enhanced mass transfer |
| Pulse cycle | 10 ms on/5 ms off | Reverse dissolution for planarization |
5. Validation & Performance
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Quality tests:
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Cross-section SEM: Void/crack inspection;
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X-ray tomography: 3D fill ratio (±1%);
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Thermal cycling: <2% resistance drift after 1000 cycles (-55–125°C).
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Production data:
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Void rate reduced from 3.2% to 0.05%;
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Plating time shortened by 30%, Cu consumption down 15%.
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